Experts in Distinctive and Customer Specific MEMS Production

Broad Range of Silicon Based MEMS Technology

Wafer Scale Integration of Peripheral Functionality

Ultra Dense and Reliable MEMS Devices

• Advanced 8-Inch Wafer Line
• 1000 m² Volume Production Clean Room Facility
• Manufacturing Execution System (MES) with Integrated SPC
• Metrology for Process Control, SPC and Cpk
• R&D Cooperation with Fraunhofer ISIT MEMS, IC and Packaging Group